New atomic layer deposition approach of boron nitride based on polymer derived ceramics route: Potentiality for functional complex nanostructure fabrication

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(Institution)
Abstract
18-055 Catherine Marichy Marichy, C.(Univ Lyon, Université Claude Bernard Lyon 1, Laboratoire des Multimatériaux et Interfaces, UMR CNRS 5615); Hao, W.(Univ Lyon, Université Claude Bernard Lyon 1, Laboratoire des Multimatériaux et Interfaces, UMR CNRS 5615); Journet, C.(Univ Lyon, Université Claude Bernard Lyon 1, Laboratoire des Multimatériaux et Interfaces, UMR CNRS 5615); Brioude, A.(Univ Lyon, Université Claude Bernard Lyon 1, Laboratoire des Multimatériaux et Interfaces, UMR CNRS 5615); Renewal clean energy and environment are two of the most important concerns for the coming decades. Fewly investigated, hexagonal BN nanostructures are very attractive materials with various applications such as in environmental domain.[1] ALD technique is an effective approach for surface modification and fabrication of complex nanostructured materials.[2] However, few ALD processes of BN were reported so far and they are mostly based on ammonia and/or halide precursors and no high crystalline quality was yet achieved.[3–5] Based on polymer derived ceramic (PDCs) chemistry, a new low temperature ALD process of BN, that permits access to various h-BN complex nano- and hetero-structures, was developed.[6] In the present communication, we report the fabrication of h-BN complex nano-/hetero-structures by a novel two-step ALD approach using trichloroborazine and hexamethyldisilazane. This two-step process consists of the growth layer by layer of a preceramic BN films, onto various substrates, at low temperature, and then to its densification into pure h-BN by annealing process. h-BN thin films were successfully deposited on various substrates/templates, such as carbon nanotubes, polyacrylonitrile fibers, and etc. The present very low deposition temperature ALD approach provides a versatile ammonia free method to fabricate high quality h-BN nano-/hetero-structures promising for water treatment.[7] [1] W. Lei, D. Portehault, D. Liu, et al. Nat. Commun. 2013, 4, 1777. [2] C. Marichy, M. Bechelany, N. Pinna, Adv. Mater. 2012, 24, 1017. [3] B. Mårlid, M. Ottosson, U. Pettersson, et al. Thin Solid Films 2002, 402, 167. [4] M. Snure, Q. Paduano, M. Hamilton, et al. Thin Solid Films 2014, 571, 51. [5] A. Haider, C. Ozgit-Akgun, E. Goldenberg, et al. J. Am. Ceram. Soc. 2014, 97, 4052. [6] W. Hao, C. Marichy, C. Journet, A. Brioude, ChemNanoMat., 2017, 3, 656-663. [7] W. Hao, C. Marichy, A. Brioude, Enviro. Science Nano., 2017, 4, 2311-2320.
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